UHP VCR Single Stage Pressure Reducing Regulators
Products Feature |
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UHP Low Pressure VCR Type(1/4" 3/8" 1/2" 3/4")
DRA100 시리즈는 초 고순도 반도체 제조용 특수 가스 라인, Bulk Gas Line, 기타 설비 라인 등에 사용하도록 개발된 UHP VCR Type Pressure Reducing Regulator입니다.
★ 반도체 생산 hook-up 라인 등에 사용 가능하도록 내부 표면은 BA 15Ra급 EP 10 Ra, 5Ra급까지 처리하였습니다. ★ 용도에 따라 2-ports, 3-ports 또는 4-ports를 선택, 사용 할 수 있습니다. ★ 입구 압력은 최대 3000psig(210bar)이고 출구압력은 모델에 따라 5psi (0.3bar) ~ 최대 250psig(17bar)까지 사용할 수 있습니다. ★ 용접, 조립, 실험, 세정 등 모든 공정은 100-class와 10-class 크린룸에서 이루어집니다.
★ 사용 중 가스라인의 미세 진동 또는 외부적 요인등으로 인하여 초기 셋팅 값이 미세하게 조금씩 변하는 현상을 완전히 해결한 당사 특허 10-1370537 Push and Lock 조절 손잡이를 적용하여 사용하기에 더욱 편리합니다. 조절 손잡이를 누르면 셋팅값이 변하는 것을 완전히 방지할 수 있고, 손잡이를 앞으로 당기면 자유롭게 원하는 압력으로 다시 셋팅 할 수 있습니다. |
Ordering Information. |
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BASIS SERIES NUMBER |
BODY MATERIAL & SURFACE FINISH |
OUTLET PRESSURE RANGE |
DIAPHRAGM MATERIAL |
MAX. INLET PRESSURE |
DRA100
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A = 316L B.A -------------- 25Ra
B = 316L E.P -------------- 10Ra
C = 316L E.P(P.E.P) ------- 5Ra
D = 316L VAR E.P ---------- 10Ra
E = 316L VAR E.P(P.E.P)---- 5Ra
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025 = 1-25psi (.1-1.7bar)
050 = 1-50psi (.1-3.5bar)
100 = 1-100psi (.1-7bar)
250 = 1-250psi (.2-17bar)
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S = STS 316L
H = Hastelloy-C |
H = 3000psi(210bar)
L = 600psi(42bar) | | |
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SEAT MATERIAL |
FLOW CAPACITY |
INLET OUTLET PORTS SIZE Type "A" ± 1.0mm |
GAUGE PORTS OPTIONS Gauge Ports |
P = PCTFE
T = Teflon
V = Vespel |
S = Cv 0.06 1/4" Standard
O = Cv 0.2 1/4" Optional
S = Cv 0.2 3/8" Standard
S = Cv 0.5 1/2" Standard
O = Cv 1.0 1/2" Optional
S = Cv 1.2 3/4" Standard |
4HP = 1/4" H.P.I.C
4MS = 1/4" Male Swivel ---- 94mm 4FS = 1/4" Female Swivel -- 94mm 4FH = 1/4" Female Swivel -- 99mm 4FL = 1/4" Female Swivel -- 114mm 4ML = 1/4" Male Swivel ---- 114mm
8MS = 3/8" Male Swivel ---- 120mm 8FS = 3/8" Female Swivel -- 120mm
2MS = 1/2" Male Swivel ---- 140mm 2FS = 1/2" Female Swivel -- 140mm 2ML = 1/2" Male Swivel ---- 180mm 2FL = 1/2" Female Swivel -- 180mm 2FSS/2MSS=1/2" F. Male Sw.122mm
3MS = 3/4" Male Swivel ---- 160mm 3FS = 3/4" Female Swivel -- 160mm
4IMF = In 1/4" Male Out 1/4" Female ----- 94mm 4IFM = In 1/4" Female Out 1/4" Male ------- 94mm
2IMF = In 1/2" Male Out 1/2" Female ----- 140mm 2IFM = In 1/2" Female Out 1/2" Male ------- 140mm 2IMFL = In 1/2" Male Out 1/2" Female ----- 180mm 2IFML = In 1/2" Female Out 1/2" Male ------- 180mm
4TS = 1/4" Tube Stubs ---- 94mm 8TS = 3/8" Tube Stubs ---- 94mm 2TS = 1/2" Tube Stubs ---- 120mm
3TS = 3/4" Tube Stubs ---- 160mm
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G0S = None ------------- 0
G1S = 1/4" H.P.I.C ------- 1
G2S = 1/4" H.P.I.C ------- 2
G2B = 1/4" H.P.I.C ------- 2
M1S = 1/4" Male Swivel -- 1
M2S = 1/4" Male Swivel -- 2
M2B = 1/4" Male Swivel -- 2
F1S = 1/4" Femle Swivel -- 1
F2S = 1/4" Femle Swivel -- 2
F2B = 1/4" Femle Swivel -- 2
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Specification |
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Ports |
DRA100-A100S-xxx-4MS-GxS 1/4" Male DRA100-A100S-xxx-4FS-GxS 1/4" Female DRA100-A100S-xxx-8MS-GxS 3/8" Male DRA100-A100S-xxx-8FS-GxS 3/8" Female DRA100-A100S-xxx-2MS-GxS 1/2" Male DRA100-A100S-xxx-2FS-GxS 1/2" Female DRA100-A100S-xxx-3MS-GxS 3/4" Male DRA100-A100S-xxx-3FS-GxS 3/4" Female |
Design Pressure |
150% maximum rated |
Leak Rate Certification |
to 1 x 10 -9 atm cc/sec Helium available. |
Body Materials |
DRA100-A100x-xxx-xxS-GxS 316L B.A ------------------ 25Ra DRA100-B100x-xxx-xxS-GxS 316L E.P ------------------ 10Ra DRA100-C100x-xxx-xxS-GxS 316L E.P(P.E.P) ------------5Ra DRA100-D100x-xxx-xxS-GxS 316L VAR E.P ---------------10Ra DRA100-E100x-xxx-xxS-GxS 316L VAR(P.E.P) ------------ 5Ra |
Bonnet Material |
Nickel Plated Brass (Stainless steel 316L Optional) |
Diaphragm |
DRA100-x100S-xxx-xxS-GxS STS 316L DRA100-x100H-xxx-xxS-GxS Hastelloy-C22 |
Main Valve |
DRA100-A100S-xxx-xxS-GxS Stainless steel 316L Standard DRA100-B100H-xxx-xxS-GxS Hastelloy-C22 Optional |
Valve Spring |
DRA100-A100S-xxx-xxS-GxS Stainless steel 316L Standard DRA100-B100H-xxx-xxS-GxS Hastelloy-C22 Optional |
Valve Seat |
DRA100-B100S-xPx-xxS-GxS PCTFE DRA100-B100S-xTx-xxS-GxS Teflon DRA100-B100S-xVx-xxS-GxS Vespel |
Inlet Pressure Ranges |
DRA100-A100S-Hxx-xxS-GxS 3000psi(210bar) DRA100-A100S-Lxx-xxS-GxS 600psi(42bar) |
Outlet Pressure Ranges |
DRA100-x025x-xxS-xMS-GxS 25psi(1.7bar) DRA100-x050x-xxS-xMS-GxS 50psi(3.4bar) DRA100-x100x-xxS-xMS-GxS 100psi(7bar) DRA100-x250x-xxS-xMS-GxS 250psi(17bar) |
Operating Temperature |
PCTFE -40°C ~ +60°C (-40°F ~ +140°F) Teflon -40°C ~ +70°C (-40°F ~ +165°F) Vespel -40°C ~ +170°C (-40°F ~ +350°F) |
Flow Capacity |
DRA100-x100x-xxS-4MS-GxS 1/4" Cv=0.06 DRA100-x100x-xxO-4MS-GxS 1/4" Cv=0.2 DRA100-x100x-xxS-8MS-GxS 3/8" Cv=0.2 DRA100-x100x-xxS-2MS-GxS 1/2" Cv=0.5 DRA100-x100x-xxO-2MS-GxS 1/2" Cv=1.2 DRA100-x100x-xxS-3MS-GxS 3/4" Cv=1.2 | |
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권장사항 : |
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각 제품들은 최고의 안전성과 쉬운 조작성을 고려하여 제작되었습니다. 그러나 가장 안전하고 효율적인 Regulator 사용을 위해서는 실제 사용 압력을 각각 모델의 사용 압력에 25% ~ 75% 이내에서 사용하면 가장 이상적인 압력을 사용할 수 있습니다, 정밀하고 원활한 작동과 제품의 수명 연장을 위해서는 각 모델의 사용 범위 내에서 사용하기를 적극 권장합니다.
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[ Unit conversion program ]
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